Micromachining/surfacing
The Microtechnology & Reliability Centre has conducted an extensive review of micromachining technology and is currently involved in the development of high energy beam (e.g. laser and electron beam) machining and surfacing techniques.
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Fig.1 Surface machined accelerometer. (Note that the gaps between fingers in the order of 5µm). Courtesy of Robert Bosch GmbH. |
Typical projects include:
- Micromachining of ceramics for sensor applications.
- Drilling micro holes in glass for the pharmaceutical industry.
- Drilling via holes in green state ceramics and epoxy laminate.
- Developing machining techniques for thin metal foils for the medical, consumer and chemical industries.
- Developing ceramic dielectric coating technology for the electronics industry.
- Developing Sol Gel wear/water resistant coating technology.
- Development of biocompatible surfacing technology for medical implants.
- Developing surface texturing techniques.
- Improving surface adhesion characteristics of metals and polymers.
Reference
Foster C P J: 'Microsystems assembly and interconnection', TWI Bulletin - July 1997(only available to TWI Industrial Members)
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