TWI Frequently asked questions
by Lee Ecclestone
The field of MEMS (micro-electro-mechanical systems) involves the interaction between the environment and electrical signals, via small (micron scale) devices. The acronym MEMS is used predominantly in the USA. Equivalent terms include
Microengineering and Microsystems, the latter being used predominantly in Europe.
A MEMS device is fabricated at the micron scale and below - for example, very small pump components are being made for insertion into the heart to aid blood flow.
However, many MEMS devices are based on silicon and the miniaturisation of currently accepted devices. As a result, the processing of Si at the micron level is extremely critical. Whilst taking advantage of many of the (Si) wafer processing capabilities developed for integrated circuits, applications of this technology are in their infancy in most cases, although some specific areas have seen MEMS devices in the marketplace for many years.
